This protocol provides the instructions for designing and fabricating stamping tools with features ranging from nanometer to micrometer scale, including the fabrication using commercial tools such as compact disks or digital video disks. In particular the reported procedures are oriented towards the tools fabrication for lithographically controlled wetting and soft lithography. Because the versatility of these methods that has almost no restrictions concerning the materials used for the stamps, a wide range of methods are provided in this protocol including photolithography, electron beam lithography, replica molding, laser engraving and nanoimprinting.
Preparation of tools for lithographically controlled wetting and soft lithography
Greco, Pierpaolo;Biscarini, Fabio
2012
Abstract
This protocol provides the instructions for designing and fabricating stamping tools with features ranging from nanometer to micrometer scale, including the fabrication using commercial tools such as compact disks or digital video disks. In particular the reported procedures are oriented towards the tools fabrication for lithographically controlled wetting and soft lithography. Because the versatility of these methods that has almost no restrictions concerning the materials used for the stamps, a wide range of methods are provided in this protocol including photolithography, electron beam lithography, replica molding, laser engraving and nanoimprinting.I documenti in SFERA sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.