A code to calculate the anisotropic elastic properties in a silicon or germanium crystal is introduced. The program, named AniCryDe, allows the user to select the crystallographic configuration of interest. For the selected crystallographic orientation, AniCryDe calculates several key mechanical parameters, such as Young’s modulus, Poisson’s ratio and the shear modulus. Furthermore, the program displays both the compliance and the stiffness tensors concerning the crystallographic orientation of interest. The code enables the user to set several parameters through a user-friendly control stage. As a result, the user obtains the complete displacement field of a deformed crystal and the curvature of any crystallographic plane. Manufacturing wafer defects such as miscut and misflat angle are also taken into account.
AniCryDe: Calculation of elastic properties in silicon and germanium crystals
CAMATTARI, Riccardo;LANZONI, Luca;BELLUCCI, Valerio;GUIDI, Vincenzo
2015
Abstract
A code to calculate the anisotropic elastic properties in a silicon or germanium crystal is introduced. The program, named AniCryDe, allows the user to select the crystallographic configuration of interest. For the selected crystallographic orientation, AniCryDe calculates several key mechanical parameters, such as Young’s modulus, Poisson’s ratio and the shear modulus. Furthermore, the program displays both the compliance and the stiffness tensors concerning the crystallographic orientation of interest. The code enables the user to set several parameters through a user-friendly control stage. As a result, the user obtains the complete displacement field of a deformed crystal and the curvature of any crystallographic plane. Manufacturing wafer defects such as miscut and misflat angle are also taken into account.I documenti in SFERA sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
