We propose a code to calculate the anisotropic elastic properties in a silicon or germanium crystal. The program allows selecting the crystallographic configuration of interest. For the selected crystallographic orientation, the program calculates several key mechanical parameters, such as the Young's modulus, the Poisson's ratio, and the shear modulus. Furthermore, the program displays the compliance and stiffness tensors concerning the crystallographic orientation of interest. The code enables the user to set several parameters through a user-friendly control stage. As a result, the user can achieve the complete displacement field of a deformed crystal, and then accordingly the curvature of any crystallographic plane, keeping also into account manufacturing wafer defects as miss-cut and miss-flat angles.
AniCryDe
CAMATTARI, Riccardo;BELLUCCI, Valerio;GUIDI, Vincenzo
2014
Abstract
We propose a code to calculate the anisotropic elastic properties in a silicon or germanium crystal. The program allows selecting the crystallographic configuration of interest. For the selected crystallographic orientation, the program calculates several key mechanical parameters, such as the Young's modulus, the Poisson's ratio, and the shear modulus. Furthermore, the program displays the compliance and stiffness tensors concerning the crystallographic orientation of interest. The code enables the user to set several parameters through a user-friendly control stage. As a result, the user can achieve the complete displacement field of a deformed crystal, and then accordingly the curvature of any crystallographic plane, keeping also into account manufacturing wafer defects as miss-cut and miss-flat angles.I documenti in SFERA sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.