The kinetics of phase transition and phase segregation induced by annealing temperature on Ti-W-O gas sensing layer was studied by x-ray diffraction, Raman spectroscopy and scanning electron microscopy. The main goal was to identify, on the basis of kinetics studies, structurally stable Ti-WO3 thin film phases and compare their response to polluting gases in order to determine possible correlations between structural and electrical properties of the sensing layers.
W-Ti-O layers for gas-sensing applications: Structure, morphology, and electrical properties
FERRONI, Matteo;GUIDI, Vincenzo;MARTINELLI, Giuliano
1998
Abstract
The kinetics of phase transition and phase segregation induced by annealing temperature on Ti-W-O gas sensing layer was studied by x-ray diffraction, Raman spectroscopy and scanning electron microscopy. The main goal was to identify, on the basis of kinetics studies, structurally stable Ti-WO3 thin film phases and compare their response to polluting gases in order to determine possible correlations between structural and electrical properties of the sensing layers.File in questo prodotto:
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